Hotzone
Heater
Outer
用途
- High purity graphite parts for CZ
- Heater / Crucible / Gr Shield, Ring
Reflector / Wafer Holder / ETC
- Parts for semiconductor manufacturing equipment
- Plates and others
特徴
- Heat resistance
- Heat and rigidity in proportion
- High heat conductivity
- Lower expansion than metal
- High chemical resistance
Material properties
(Extruded graphite)
| Standard Grades |
Specific Gravity |
Specific Resistivity(μΩm) |
Flexural Strength (Mpa) |
Shore Hardness(-) |
C.T.E (X10-6/℃) |
Thermal Conductivity (W/mk) |
Standard Sizes (mm) |
|---|---|---|---|---|---|---|---|
| FE200 | 1.65 | 9.0 | 19.6 | 30 | 3.3 | 144 | 100X510X2000 120X600X2000 150X510X2000 |
| FE250 | 1.75 | 8.0 | 24.5 | 35 | 3.3 | 162 | |
| EE200 | 1.65 | 9.0 | 19.6 | 30 | 3.3 | 144 | Φ50~Φ300X1800 |
| EE250 | 1.75 | 8.0 | 24.5 | 35 | 3.3 | 162 |
Material properties
(Isotropic graphite)
| Standard Grades |
Specific Gravity |
Specific Resistivity(μΩm) |
Young’s Modulus (Gpa) |
Flexural Strength (Mpa) |
Shore Hardness(-) |
C.T.E (X10-6/℃) |
Thermal Conductivity(W/mk) |
|---|---|---|---|---|---|---|---|
| G250 | 1.7 | 12.0 | 9.8 | 39.2 | 46 | 4.8 | 108 |
| G320 | 1.75 | 14.0 | 9.3 | 32.3 | 46 | 4.3 | 93 |
| G330 | 1.79 | 13.0 | 9.8 | 39.2 | 56 | 4.8 | 104 |
| G347 | 1.85 | 11.0 | 10.8 | 49.0 | 58 | 5.5 | 116 |
| G348 | 1.92 | 10.0 | 12.3 | 63.7 | 68 | 5.5 | 128 |
| G458 | 1.86 | 9.5 | 11.3 | 53.9 | 54 | 4.4 | 139 |
| G520 | 1.83 | 12.0 | 10.8 | 56.8 | 62 | 5.5 | 116 |
| G530 | 1.82 | 13.0 | 11.3 | 61.7 | 64 | 5.5 | 104 |
| G535 | 1.82 | 17.0 | 10.8 | 63.7 | 72 | 5.5 | 81 |
| G540 | 1.85 | 15.0 | 13.7 | 88.2 | 78 | 5.5 | 93 |