주요사업

젊음의 에너지와 상상력으로
세계 반도체 기술을 리드하겠습니다.

Graphite Components

반도체용 실리콘 Wafer 및 태양전지용 Wafer를 생산하기 위한 Crystal Grower 장비 부품과 고온에 강한 고순도 흑연부품
Hotzone
Heater
Outer

용도

High purity graphite parts for CZ
Heater / Crucible / Gr Shield, Ring
Reflector / Wafer Holder / ETC
Parts for semiconductor manufacturing equipment
Plates and others

특징

  • Heat resistance
  • Heat and rigidity in proportion
  • High heat conductivity
  • Lower expansion than metal
  • High chemical resistance

Material properties
(Extruded graphite)

Material properties
Standard
Grades
Specific
Gravity
Specific
Resistivity(μΩm)
Flexural
Strength (Mpa)
Shore
Hardness(-)
C.T.E
(X10-6/℃)
Thermal
Conductivity
(W/mk)
Standard Sizes
(mm)
FE200 1.65 9.0 19.6 30 3.3 144 100X510X2000
120X600X2000
150X510X2000
FE250 1.75 8.0 24.5 35 3.3 162
EE200 1.65 9.0 19.6 30 3.3 144 Φ50~Φ300X1800
EE250 1.75 8.0 24.5 35 3.3 162

Material properties
(Isotropic graphite)

Material properties
Standard
Grades
Specific
Gravity
Specific
Resistivity(μΩm)
Young’s Modulus
(Gpa)
Flexural
Strength (Mpa)
Shore
Hardness(-)
C.T.E
(X10-6/℃)
Thermal
Conductivity(W/mk)
G250 1.7 12.0 9.8 39.2 46 4.8 108
G320 1.75 14.0 9.3 32.3 46 4.3 93
G330 1.79 13.0 9.8 39.2 56 4.8 104
G347 1.85 11.0 10.8 49.0 58 5.5 116
G348 1.92 10.0 12.3 63.7 68 5.5 128
G458 1.86 9.5 11.3 53.9 54 4.4 139
G520 1.83 12.0 10.8 56.8 62 5.5 116
G530 1.82 13.0 11.3 61.7 64 5.5 104
G535 1.82 17.0 10.8 63.7 72 5.5 81
G540 1.85 15.0 13.7 88.2 78 5.5 93