SiC Ring
Dummy Wafer
Shower Head
용도
- SiC Ring
- SiC Shower Head
- SiC Dummy Wafer
특징
- No heat deformation
- No outgassing
- Long lifetime compared with Si
- Excellent chemical resistance
Material Properties of SiC
| SiC | ||
|---|---|---|
| 사용분야 | 반도체 장비 세라믹 치구 (Focus Ring, SiC Wafer) | |
| 주요특징 | 초고순도, 내플라즈마 특성 우수 | |
| Properties | Purity | >99.9999% |
| Density (g/cm 3) | 3.21 | |
| Thermal conductivity (W/m-K) | 200 ~ 360 | |
| Coefficient of thermal expansion(/℃) | 4.5~5 | |
| Hardness (kg/mm 2) | 2900~3300 | |
| Resistivity [Ωcm] | 0.1~15,000 | |
| Corrosion resistance, (HCl)[2300 ℃] | x | |