主要事業

若さのエネルギーと想像力で世界の半導体技術をリードします。

Graphite Components

半導体用シリコンWafer及び太陽電池用Waferを生産するためのCrystal Grower装備部品と高温に強い高純度黒鉛部品
Hotzone
Heater
Outer

用途

High purity graphite parts for CZ
Heater / Crucible / Gr Shield, Ring
Reflector / Wafer Holder / ETC
Parts for semiconductor manufacturing equipment
Plates and others

特徴

  • Heat resistance
  • Heat and rigidity in proportion
  • High heat conductivity
  • Lower expansion than metal
  • High chemical resistance

Material properties
(Extruded graphite)

Material properties
Standard
Grades
Specific
Gravity
Specific
Resistivity(μΩm)
Flexural
Strength (Mpa)
Shore
Hardness(-)
C.T.E
(X10-6/℃)
Thermal
Conductivity
(W/mk)
Standard Sizes
(mm)
FE200 1.65 9.0 19.6 30 3.3 144 100X510X2000
120X600X2000
150X510X2000
FE250 1.75 8.0 24.5 35 3.3 162
EE200 1.65 9.0 19.6 30 3.3 144 Φ50~Φ300X1800
EE250 1.75 8.0 24.5 35 3.3 162

Material properties
(Extruded graphite)

Material properties
Standard
Grades
Specific
Gravity
Specific
Resistivity(μΩm)
Young’s Modulus
(Gpa)
Flexural
Strength (Mpa)
Shore
Hardness(-)
C.T.E
(X10-6/℃)
Thermal
Conductivity(W/mk)
G250 1.7 12.0 9.8 39.2 46 4.8 108
G320 1.75 14.0 9.3 32.3 46 4.3 93
G330 1.79 13.0 9.8 39.2 56 4.8 104
G347 1.85 11.0 10.8 49.0 58 5.5 116
G348 1.92 10.0 12.3 63.7 68 5.5 128
G458 1.86 9.5 11.3 53.9 54 4.4 139
G520 1.83 12.0 10.8 56.8 62 5.5 116
G530 1.82 13.0 11.3 61.7 64 5.5 104
G535 1.82 17.0 10.8 63.7 72 5.5 81
G540 1.85 15.0 13.7 88.2 78 5.5 93